Optical properties of reactively sputtered silicon nitride films : E. Paule, E. Elizalde, J. M. Martinez-Duart and J. M. Albella. Vacuum37, 395 (1987)

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 237 KB
• Volume: 28
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(88)90105-9