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Optical properties of reactively sputtered a-SiHx films

✍ Scribed by J.P. de Neufville; T.D. Moustakas; A.F. Ruppert; W.A. Lanford


Book ID
118331458
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
497 KB
Volume
35-36
Category
Article
ISSN
0022-3093

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