Optical properties of high transmittance aluminum oxynitride thin films for spectral range from near ultraviolet to visible

✍ Scribed by Yung-Hsin Lin; Jin-Cherng Hsu; Yi Ding; Paul W. Wang

• Publisher: Optical Society of Japan
• Year: 2009
• Tongue: English
• Weight: 172 KB
• Volume: 16
• Category: Article
• ISSN: 1340-6000
• DOI: 10.1007/s10043-009-0076-6