𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Optical properties of fluorinated diamond-like carbon films produced by pulsed glow discharge plasma immersion ion processing

✍ Scribed by Hakovirta, M.; He, X. M.; Nastasi, M.

Book ID
120477350
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
297 KB
Volume
88
Category
Article
ISSN
0021-8979

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Correlations between process parameters
Correlations between process parameters and film properties of diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation
✍ W. Ensinger πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 830 KB

Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation and carbon thin film deposition. The films are diamond-like carbon (DLC), mostly amorphous carbon with hydrogen (a-C:H). In the present review, examples from the literature on the deposition of HC-PI