✦ LIBER ✦

Optical properties and stress of ion-assisted aluminum nitride thin films

✍ Scribed by Martin, Philip ;Netterfield, Roger ;Kinder, Terry ;Bendavid, Avi

Book ID: 115342468
Publisher: The Optical Society
Year: 1992
Tongue: English
Weight: 787 KB
Volume: 31
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.31.006734

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