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Optical properties and local bonding configurations of hydrogenated amorphous silicon nitride thin films

✍ Scribed by Mei, J. J.; Chen, H.; Shen, W. Z.; Dekkers, H. F. W.


Book ID
120367077
Publisher
American Institute of Physics
Year
2006
Tongue
English
Weight
418 KB
Volume
100
Category
Article
ISSN
0021-8979

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