Optical profilometry and its application to mechanically inaccessible surfaces Part I: Principles of focus error detection

✍ Scribed by M. Visscher; K.G. Struik

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 549 KB
• Volume: 16
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(94)90124-4