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Optical pressure sensor based on a Mach-Zehnder interferometer integrated with a lateral a-Si:H p-i-n photodiode

✍ Scribed by Wagner, C.; Frankenberger, J.; Deimel, P.P.


Book ID
119784001
Publisher
IEEE
Year
1993
Tongue
English
Weight
243 KB
Volume
5
Category
Article
ISSN
1041-1135

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