Optical MEMS, Nanophotonics, and Their Applications

✍ Scribed by Guangya Zhou, Chengkuo Lee

• Publisher: CRC Press
• Year: 2018
• Tongue: English
• Leaves: 447
• Series: Series in Optics and Optoelectronics
• Edition: 1
• Category: Library

✦ Synopsis

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems.

• Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration.
• Showcases the integration of MEMS and optical/photonic devices into real commercial products.
• Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems.

Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore.

Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

✦ Table of Contents

Content: Section Iâ Optical MEMS for communication, imaging, and sensing applications1 Optical MEMS: An introductionGuangya Zhou and Chengkuo Lee2 MEMS optical scanners for laser projection displayHiroshi Toshiyoshi3 Optical micro-electrical-mechanical phased arrayYoumin Wang and Ming-Chiang Wu4 Optical MEMS for space: Design, characterization, and applicationsFrederic Zamkotsian5 MEMS vibratory grating scanners and their applicationsGuangya Zhou6 F-P filters and applications in spectrometers and gas sensingChong Pei Ho and Chengkuo Lee7 Electrothermally actuated MEMS mirrors: Design, modeling, and applicationsHuikai Xie, Xiaoyang Zhang, Liang Zhou, and Sagnik Pal8 MEMS tunable optics: Liquid and solid methodsYongchao Zou and Guangya ZhouSection IIâ Nanophotonics for communication, imaging, and sensing applications9 Physical sensors based on photonic crystalsBo Li and Chengkuo Lee10 Silicon photonic variable waveguide coupler devicesKazuhiro Hane11 Metasurface and ultrathin optical devicesXianzhong Chen, Dandan Wen, and Fuyong Yue12 Optical micro- and nanoresonators for biochemical sensingXingwang Zhang, Liying Liu, Lei Xu, Xudong Fan, and Guangya Zhou13 Terahertz MEMS metamaterialsPrakash Pitchappa and Chengkuo LeeSection IIIâ Biomicro- and nanophotonics and optofluidics for health care applications14 Optofluidic devices and their applicationsSung-Yong Park15 Implantable CMOS microphotonic devicesJun Ohta and Takashi Tokuda16 Microfluidic photocatalysisNing Wang and Xuming Zhang

✦ Subjects

Optical MEMS.;Nanophotonics.;TECHNOLOGY & ENGINEERING / Mechanical.