✦ LIBER ✦
Optical Interference Lithography Using Azobenzene-Functionalized Polymers for Micro- and Nanopatterning of Silicon
✍ Scribed by Aleksandr Kravchenko; Andriy Shevchenko; Victor Ovchinnikov; Arri Priimagi; Matti Kaivola
- Publisher
- John Wiley and Sons
- Year
- 2011
- Tongue
- English
- Weight
- 443 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0935-9648
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