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Optical in situ monitoring of solid phase crystallization of amorphous silicon

โœ Scribed by Ralf B. Bergmann


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
272 KB
Volume
165
Category
Article
ISSN
0022-0248

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The fraction solid is a key parameter of solidification describing in an integral way how the mushy zone develops during solidification. In this paper we describe a new technique that measures the fraction solid in-situ, nearly non-invasive optically utilizing a new technique for directional solidif