Optical in-situ measurement of the dissolution rate of a silica-Czochralski-crucible with silicon melt and comparison to ex-situ measurements

Quantitative optical in-situ measurement

Quantitative optical in-situ measurement of the dissolution rate of the silica crucible in the silicon Czochralski process

✍ A Mühe; G Müller 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 614 KB

The dissolution of the silica crucible by the silicon melt acts as a source of oxygen doping in the growth of silicon single crystals by the Czochralski-method. Literature data on the dissolution rate of silica in silicon melts are available up to now only from ex-situ measurements. In the present w