Optical imaging of microroughness on polished silicon wafers: Pidduck, A. J.; Nayar, V. Applied Physics A: Solids and Surfaces. 1991 Dec; 53(6): 557–562

• Book ID: 103532063
• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 155 KB
• Volume: 15
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(93)90332-5