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Optical functions of silicon-germanium alloys determined using spectroscopic ellipsometry

โœ Scribed by G.E. Jellison Jr.; T.E. Haynes; H.H. Burke


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
1019 KB
Volume
2
Category
Article
ISSN
0925-3467

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## Abstract This work investigates the capability of spectroscopic ellipsometry to measure charge trapping centers in thin dielectric films. Specific interfacial electrostatic fields, induced by electrons injected into charge trapping states at the interface, have been identified that directly affe