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Optical emissions in the wavelength region 2000-6000 AA produced by electron impact dissociation of NF 3 , CF 4 and SF 6

✍ Scribed by Blanks, K A; Becker, K


Book ID
121858867
Publisher
Institute of Physics
Year
1987
Tongue
English
Weight
447 KB
Volume
20
Category
Article
ISSN
0022-3700

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