✦ LIBER ✦
Optical emission spectroscopy on an industrial PACVD system for titanium nitride
✍ Scribed by R. Hochreiter; J. Laimer; H. Störi; D. Heim
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 564 KB
- Volume
- 74-75
- Category
- Article
- ISSN
- 0257-8972
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