✦ LIBER ✦
Optical emission spectroscopy investigation on SiCOH films deposition using decamethylcyclopentasiloxane electron cyclotron resonance plasma
✍ Scribed by Chao Ye; Zhaoyuan Ning; Yu Xin; Tingting Wang; Xiaozhu Yu; Meifu Jiang
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 707 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0167-9317
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