Optical emission end point detection for via hole etching in InP and GaAs power device structures

✍ Scribed by S.J. Pearton; F. Ren; C.R. Abernathy; C. Constantine

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 530 KB
• Volume: 23
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(94)90275-5