Optical Diagnostics for Thin Film Processing

✍ Scribed by Irving P. Herman (Auth.)

Publisher: Academic Press
Year: 1996
Tongue: English
Leaves: 784
Category: Library

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✦ Synopsis

''The greatest value of Optical Diagnostics for Thin Film Processing is a comprehensive reference text. I highly recommend it to anyone who wants to seriously delve into the field of thin film optical diagnostics or wants a single source book of well-organized and very high-density information on this subject.''
--William G. Breiland, Sandia National Laboratories, OPTICAL ENGINEERING.

✦ Table of Contents

Content:
Preface, Pages xv-xvii
Notations and Symbols, Pages xix-xxix
Chapter 1 - Overview of Optical Diagnostics, Pages 1-55
Chapter 2 - The Properties of Light, Pages 57-65
Chapter 3 - The Structure of Matter, Pages 67-79
Chapter 4 - Interactions of Light with Matter for Spectroscopy, Pages 81-118
Chapter 5 - Diagnostics Equipment and Methods, Pages 119-155
Chapter 6 - Optical Emission Spectroscopy, Pages 157-213
Chapter 7 - Laser-Induced Fluorescence, Pages 215-261
Chapter 8 - Transmission (Absorption), Pages 263-325
Chapter 9 - Reflection, Pages 327-479
Chapter 10 - Interferometry and Photography, Pages 481-493
Chapter 11 - Elastic Scattering and Diffraction from Particles and Nonplanar Surfaces (Scatterometry), Pages 495-557
Chapter 12 - Raman Scattering, Pages 559-590
Chapter 13 - Pyrometry, Pages 591-617
Chapter 14 - Photoluminescence, Pages 619-636
Chapter 15 - Spectroscopies Employing Laser Heating, Pages 637-653
Chapter 16 - Nonlinear Optical Diagnostics, Pages 655-672
Chapter 17 - Optical Electron/Ion Probes, Pages 673-687
Chapter 18 - Optical Thermometry, Pages 689-714
Chapter 19 - Data Analysis and Process Control, Pages 715-738
Index, Pages 739-783

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