✦ LIBER ✦
Optical design of hybrid-type attenuated phase-shift masks for extreme-ultraviolet lithography by use of a Fabry-Perot interference filter
✍ Scribed by Kang, Hee Young ;Hwangbo, Chang Kwon
- Book ID
- 115353839
- Publisher
- The Optical Society
- Year
- 2007
- Tongue
- English
- Weight
- 702 KB
- Volume
- 47
- Category
- Article
- ISSN
- 1559-128X
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