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Optical design and performance of an XUV FEL oscillator

✍ Scribed by John C. Goldstein; Brian D. McVey; Brian E. Newman

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
507 KB
Volume
296
Category
Article
ISSN
0168-9002

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## Abstract This letter presents a novel MEMS‐based multifunction‐integrated optical device capable of performing as variable optical power splitter (VOPS), optical switch (OS), and variable optical attenuator (VOA). The device manipulates the light with a binary‐slope mirror driven by compound ele