Optical Control of Group-III and N Flux Intensities in Plasma-Assisted MBE with RF Capacitively-Coupled Magnetron Nitrogen Activator

✍ Scribed by Jmerik, V.N. ;Vekshin, V.A. ;Davydov, V.Yu. ;Ratnikov, V.V. ;Tkachman, M.G. ;Shubina, T.V. ;Ivanov, S.V.

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 90 KB
• Volume: 188
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(200112)188:2<615::aid-pssa615>3.0.co;2-j