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Optical characterization of diamond-like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry

✍ Scribed by Franta, D.; Zajı́čková, L.; Ohlı́dal, I.; Janča, J.; Veltruská, K.

Book ID
122023251
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
367 KB
Volume
11
Category
Article
ISSN
0925-9635

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## Abstract Silicon oxynitride (SiO~x~ N~y~) thin films were deposited on silicon substrates by ion‐assisted deposition. Variable angle spectroscopic ellipsometry (VASE) was used to optically characterize the deposited film properties, such as layer thickness and composition, film surface and inter