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Optical characterization of aluminum-doped zinc oxide films by advanced dispersion theories

โœ Scribed by Andreas Pflug; Volker Sittinger; Florian Ruske; Bernd Szyszka; Georg Dittmar


Book ID
113936752
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
621 KB
Volume
455-456
Category
Article
ISSN
0040-6090

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The measurements of thin-film mechanical properties are generally influenced by the elastic and plastic responses of substrates and consequently may be inaccurate. Thus in this study, the effects of three different substrates, including sapphire, glass and polyimide, on the mechanical characterizati