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Optical characteristics of multi-layer structures formed by ion beam synthesis and their computer simulation

✍ Scribed by Yuehui Yu; Chenglu Lin; Xianghuai Liu; Shichang Zou; P.L.F. Hemment


Book ID
113282475
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
388 KB
Volume
55
Category
Article
ISSN
0168-583X

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## Abstract We have studied the ion‐beam synthesis of GaSb nanocrystals in Si by high‐fluence implantation of Sb and Ga ions followed by thermal annealing. RBS, TEM/TED, RS, and photoluminescence (PL) were employed to characterize the implanted layers. It was found that the nanocrystals size increa