Optical anisotropy of AlN epilayer on sapphire substrate investigated by variable-angle spectroscopic ellipsometry

✍ Scribed by Wei Jiang; Wei Lin; Shuping Li; Jincan Chen; Junyong Kang

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 372 KB
• Volume: 32
• Category: Article
• ISSN: 0925-3467
• DOI: 10.1016/j.optmat.2010.01.015