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Optical and structural properties of SiOx and SiNx materials

✍ Scribed by E. Dehan; P. Temple-Boyer; R. Henda; J.J. Pedroviejo; E. Scheid

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 611 KB
Volume: 266
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)06635-7

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