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Optical and mechanical properties of dc sputtered carbon films

✍ Scribed by Rubin, M.; Hopper, C. B.; Cho, N-H.; Bhushan, B.

Book ID: 125519605
Publisher: Cambridge University Press
Year: 1990
Tongue: English
Weight: 415 KB
Volume: 5
Category: Article
ISSN: 0884-2914
DOI: 10.1557/JMR.1990.2538

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