Operational data of a simple microfocus ion gun using an EHD-type indium ion source: M J Higatsberger, P Pollinger and H Studnicka, Inst-f-Exper Physik/Univ, Vienna, Austria F G Rüdenauer, Austrian Res Ctr Seibersdorf, Lenaugasse 10, A-1082 Vienna, Austria

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 80 KB
• Volume: 33
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(83)90571-7