✦ LIBER ✦
Open questions in electronic sputtering of solids by slow highly charged ions with respect to applications in single ion implantation
✍ Scribed by T. Schenkel; I.W. Rangelow; R. Keller; S.J. Park; J. Nilsson; A. Persaud; V.R. Radmilovic; P. Grabiec; D.H. Schneider; J.A. Liddle; J. Bokor
- Book ID
- 113822883
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 385 KB
- Volume
- 219-220
- Category
- Article
- ISSN
- 0168-583X
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