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Online Optimal Transmission Line Parameter Estimation for Relaying Applications

✍ Scribed by Yuan Liao; Kezunovic, M.

Book ID
115535864
Publisher
IEEE
Year
2009
Tongue
English
Weight
444 KB
Volume
24
Category
Article
ISSN
0885-8977

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## Abstract The use of optimal parameter estimation for the online regulation of final etch depth in an ion milling process is described. A model‐based control system utilizes a 3‐D surface evolution model to predict dynamic surface profiles and etch depth. A heterodyne laser interferometer is used