One-step lithography for fabrication of multifunction diffractive structures with grey-tone mask

✍ Scribed by Fuhua Gao; Jun Yao; Yangsu Zeng; Shiwei Xie; Yongkang Guo; Zheng Cui

• Book ID: 114155452
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 296 KB
• Volume: 61-62
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(02)00527-0