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On the use of a multiple magnetron arrangement for metallization of electronic components at high productivity

✍ Scribed by S. Schiller; U. Heisig; K. Goedicke; J. Hartung; A. Heinrich; A. Müller; J. Partzsch

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
960 KB
Volume
36
Category
Article
ISSN
0257-8972

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