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On the two- and three-dimensional simulation of ion-milled structures

✍ Scribed by H.M. Hütten; K.-D. Raddatz; M.K. Sharma; J. Engemann

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 886 KB
Volume: 46
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(90)90161-r

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