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On the tip calibration for accurate modulus measurement by contact resonance atomic force microscopy

โœ Scribed by Passeri, D.; Rossi, M.; Vlassak, J.J.


Book ID
121180975
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
746 KB
Volume
128
Category
Article
ISSN
0304-3991

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The atomic force microscope (AFM) continues to fi nd increasing applications in nanoscale imaging, [ 1 ] metrology, [ 2 ] devices, [ 3 ] and manufacturing. [ 4 ] In these applications, tip size and shape critically affect the accuracy, resolution, and reliability of measurements and processes. [ 5 ]