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On the squeeze-film damping of micro-resonators in the free-molecule regime

โœ Scribed by Hutcherson, Sarne; Ye, Wenjing

Book ID
121419651
Publisher
Institute of Physics
Year
2004
Tongue
English
Weight
176 KB
Volume
14
Category
Article
ISSN
0960-1317

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๐Ÿ“œ SIMILAR VOLUMES

Squeeze film damping in the free molecul
Squeeze film damping in the free molecular flow regime with full thermal accommodation
โœ M.A.G. Suijlen; J.J. Koning; M.A.J. van Gils; H.C.W. Beijerinck ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 692 KB

We introduce an analytical model for the gas damping of a MEMS resonator in the regime of free molecular flow. Driving force in this model is the change in density in the gap volume due to the amplitude of the oscillating microstructure, which is counteracted by the random walk diffusion in the gap