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On the role of pressure pulses in clusterization processes under irradiation

โœ Scribed by Izraileva, L. K.; Rumanov, E. N.


Book ID
125394209
Publisher
Pleiades Publishing
Year
2014
Tongue
English
Weight
173 KB
Volume
8
Category
Article
ISSN
1027-4510

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## Abstract Silicon is the dominant material in electronic industry. Its use for various applications requires processing stages, important among them those involving thermal treatments. Such treatments in Si trigger the mechanisms of oxygen aggregation resulting in the formation of oxygen precipit