On the possibility of physical vapour deposition process design by coordinated substrate rotation modes

✍ Scribed by B. Rother

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 444 KB
• Volume: 64
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(94)90102-3