On the phenomenological model of preferred sputtering for SIMS and Auger profiling: A critical analysis

✍ Scribed by N.J. Chou; M.W. Shafer

• Publisher: Elsevier Science
• Year: 1980
• Weight: 50 KB
• Volume: 92
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(80)90097-3