✦ LIBER ✦
On the Monte Carlo simulation program ‘RESIS’ for electron exposure of resists : P. R. Deshmukh and W. S. Khokle. Solid-St. Elect. 32(4), 261 (1989)
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 140 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0026-2714
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