On the mechanism of sputtering of SiO2 by Ar at ion energies near the sputtering threshold : S. S. Todorov and I. R. Chakarov. Vacuum39(11/12), 1101 (1989)

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 132 KB
• Volume: 30
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(90)90647-6