On the measurement of impurity atom distributions in silicon by the differential capacitance technique : D. P. Kennedy, P. C. Murley and W. Kleinfelder, IBM J. Res. Dev., September (1968), p. 399

• Publisher: Elsevier Science
• Year: 1969
• Tongue: English
• Weight: 100 KB
• Volume: 8
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(69)90147-4