Hydrogen action in the surface space cha
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A. Akremi; J.P. Lacharme; C.A. SΓ©benne
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Article
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1991
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Elsevier Science
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English
β 254 KB
The action of atomic hydrogen on clean cleaved (1 1 1) surfaces of highly doped silicon samples, both phosphorus ([n] 2 x 10 I" cm ~) and boron ([p]-4 Γ 1(1 ~ cm 3) doped has been compared to the case of lightly doped samples (In] = 1 Γ 10 ~4 cm ~). Once cleaved under ultra high vacuum, the samples