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On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects

โœ Scribed by Z.S. Ma; Y.C. Zhou; S.G. Long; C. Lu

Book ID
113655935
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
975 KB
Volume
34
Category
Article
ISSN
0749-6419

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A method to evaluate the substrate effect quantitatively in film indentation is proposed. For the thin film deposited on the substrate, the power function relationship is used to describe the loading curve of the film indentation behavior. The loading curve exponent of the power function which is th