✦ LIBER ✦
On the interaction of hydrogen RF plasma with implantation-induced defects in MOS structures : P. Danesh, S. Kaschieva and A. Djakov. Solid-St. Electron.28(11), 1095 (1985)
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 59 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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