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On the interaction between measurement strategy and control performance in semiconductor manufacturing

✍ Scribed by An-Jhih Su; Cheng-Ching Yu; Babatunde A. Ogunnaike

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 265 KB
Volume: 18
Category: Article
ISSN: 0959-1524
DOI: 10.1016/j.jprocont.2007.07.005

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