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On the identification of the vibrational spectra in hydrogen implanted crystalline silicon

✍ Scribed by B.N. Mukashev; K.H. Nussupov; M.F. Tamendarov; V.V. Frolov


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
361 KB
Volume
87
Category
Article
ISSN
0375-9601

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Micro-engineered transducers, such as vibratory gyroscopes, accelerometers and pressure transducers made from wafers of crystalline silicon, are becoming increasingly common. These often contain ring-like components, the vibration properties of which are crucial to the operation of the transducer. T