✦ LIBER ✦
On the effects of implantation of ions in the MeV energy range into silicon : L. K. Wang, C. T. Chuang and G. P. Li. Solid-St. Electron.29(7), 739 (1986)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 129 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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