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On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources

✍ Scribed by Elata, D.; Bamberger, H.

Book ID: 115508763
Publisher: IEEE
Year: 2006
Tongue: English
Weight: 530 KB
Volume: 15
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2005.864148

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