On the diffusion and activation of n-type dopants in Ge [Mater. Sci. Semicond. Process. 15 (2012) 642–655]

✍ Scribed by Vanhellemont, Jan; Simoen, Eddy

• Book ID: 123186181
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 287 KB
• Volume: 17
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2013.10.001